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7022 Three Axis Capacitive Accelerometer and Tilt Sensor
Description The 7022 accelerometer module has one,
two or three orthogonal analog capacitive accelerometers with high drive,
low impedance, buffering for measuring in harsh environments. It is tailored
for zero to medium frequency instrumentation applications for the
measurements of vibration or orientation (tilt). Each of the internal
accelerometers contains a miniature, hermetically sealed micromachined
capacitive sense element and a custom integrated circuit sense amplifier.
On-board voltage regulation and an internal voltage reference eliminate the
need for precision power supplies. In addition, the 7022 includes an
amplifier on each axis to produce high-level outputs. The 7022 is
insensitive to temperature changes and its frequency response includes DC. Operation The 7022 accelerometer module produces
three analog voltage outputs that vary with acceleration and orientation.
The “Z” axis is perpendicular to the bottom of the package, with positive
acceleration defined as a vibration on the bottom of the package. The “X”
and “Y” axis directions are marked on the cover with positive acceleration
defined as acceleration in the direction of the axis arrow. The outputs are
single ended and vary with respect to the voltage at the OUTPUT REF input
which should be approximately centered between the +Vs and -Vs supply
voltages. The output scale factor is independent of the supply voltages from
±12 to ±18 volts. At zero acceleration the output differential voltage is
nominally zero volts; at ±full-scale acceleration the output voltage is ±5
volts respectively. Applications
+Vs (Power): Red wire. Apply +12 to +18 Volts
DC with respect to OUTPUT REF. Performance by Acceleration Level: Vs = ±12 to ±18 VDC; Tc = 25º C
Performance: Vs = ±12 to ±18 VDC; Tc = 25º C unless otherwise specified
* The power source must be capable of providing at least 3 times the
operating current at turn-on.
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